multi-modal microscopy

**Multi-Modal Microscopy** is a **characterization strategy that simultaneously or sequentially acquires multiple types of signals from a single instrument** — collecting complementary information (topography, composition, crystallography, electrical properties) in a single analysis session. **Key Multi-Modal Platforms** - **SEM**: SE imaging + BSE imaging + EDS + EBSD + cathodoluminescence simultaneously. - **TEM**: BF/DF imaging + HAADF-STEM + EELS + EDS in the same column. - **AFM**: Topography + phase + electrical (c-AFM, KPFM) + mechanical (force curves) in one scan. - **FIB-SEM**: 3D serial sectioning with simultaneous SEM imaging + EDS mapping. **Why It Matters** - **Efficiency**: Multiple data types in one session saves time and ensures perfect spatial registration. - **Co-Located Data**: Every signal is from exactly the same location — no registration errors. - **Machine Learning**: Multi-modal data enables ML-assisted defect classification and materials identification. **Multi-Modal Microscopy** is **one instrument, many answers** — collecting diverse analytical data simultaneously for efficient, co-registered characterization.