AGV Routing in semiconductor fabs involves optimizing paths for Automated Guided Vehicles that transport wafer lots between process tools.

What Is AGV Routing?

• System: AMHS (Automated Material Handling System) component
• Goal: Minimize transport time while avoiding collisions
• Methods: Shortest path, traffic-aware, predictive routing
• Scale: 500+ AGVs in modern 300mm fabs

Why AGV Routing Optimization Matters

Inefficient routing causes tool starvation, WIP pileups, and cycle time increases. Optimized routing can improve fab throughput 5-15%.

<svg viewBox="0 0 485 264" xmlns="http://www.w3.org/2000/svg" style="max-width:100%;height:auto" role="img"><rect x="0" y="0" width="485" height="264" rx="12" fill="#0d1117"/><g font-family="ui-monospace,SFMono-Regular,Menlo,Consolas,&quot;Liberation Mono&quot;,monospace" font-size="14"><text xml:space="preserve" x="20" y="31.7"><tspan fill="#c9d1d9">AGV Routing Challenges:</tspan></text><text xml:space="preserve" x="20" y="50.7"><tspan fill="#6e7681">┌─────────────────────────────────────┐</tspan></text><text xml:space="preserve" x="20" y="69.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">   Tool A    </tspan><tspan fill="#6e7681">═══════╗</tspan><tspan fill="#c9d1d9">    Tool B      </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="88.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">      </tspan><tspan fill="#6e7681">↑</tspan><tspan fill="#c9d1d9">      Corridor </tspan><tspan fill="#6e7681">╣</tspan><tspan fill="#c9d1d9">      </tspan><tspan fill="#6e7681">↓</tspan><tspan fill="#c9d1d9">       </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="107.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">    AGV1  </tspan><tspan fill="#6e7681">←──</tspan><tspan fill="#c9d1d9">  </tspan><tspan fill="#6e7681">═══════╝</tspan><tspan fill="#c9d1d9">  </tspan><tspan fill="#6e7681">──→</tspan><tspan fill="#c9d1d9"> AGV2    </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="126.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">                 </tspan><tspan fill="#6e7681">↑</tspan><tspan fill="#c9d1d9">                    </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="145.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">             Conflict!               </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="164.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">                                     </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="183.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">   Tool C    </tspan><tspan fill="#6e7681">════════════</tspan><tspan fill="#c9d1d9">   Tool D   </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="202.7"><tspan fill="#6e7681">└─────────────────────────────────────┘</tspan></text><text xml:space="preserve" x="20" y="221.7"></text><text xml:space="preserve" x="20" y="240.7"><tspan fill="#c9d1d9">Routing must prevent deadlocks and minimize wait time</tspan></text></g></svg>

Routing Algorithm Factors: