Barcode scanners read printed or laser-scribed identification codes on wafers, lots, cassettes, and FOUPs for tracking and traceability throughout semiconductor manufacturing.

Barcode Types in Fabs

1D Barcodes are traditional linear barcodes on lot travelers, cassettes, and chemical containers. 2D Matrix (Data Matrix) codes are laser-scribed on wafer backsides, encoding wafer ID in a small dot pattern that remains readable even after processing. OCR (Optical Character Recognition) reads human-readable text alongside barcodes for redundancy.

Where Scanners Are Used

Lot tracking scans lot ID at each process step for MES tracking and history. Wafer-level ID uses backside 2D matrix codes to identify individual wafers within a lot, read by specialized wafer readers at key process points. Chemical management scans container barcodes to verify correct chemistry is loaded in wet benches. Reticle management reads reticle barcodes to confirm the correct mask is loaded in lithography tools.

Scanner Types

Handheld scanners: Operators scan lot travelers manually at non-automated tools. Fixed-mount scanners: Permanently installed at tool load ports for automatic reading. Wafer readers: Specialized equipment reads laser-scribed 2D codes on wafer backsides through FOUP windows or at prealign stations.

Integration

Scanners connect to MES via serial or network interface. Each scan event updates lot location and triggers recipe download or dispatch instructions.