Chemical delivery systems automate mixing, blending, dilution, and dispensing of liquid chemicals to semiconductor process tools. Functions: Store chemical inventory, blend formulations, dilute with DI water, deliver precise volumes, track usage. Components: Chemical storage drums or tanks, pumps, flow meters, mixing vessels, filters, delivery manifolds, control systems. Automation: Recipes define chemical mix ratios. System blends automatically. Eliminates manual mixing errors. Purity maintenance: Closed system minimizes contamination. High-purity materials throughout. Chemical types delivered: Wet etch chemistries, photoresist developers, CMP slurries, cleaning solutions, rinse chemicals. Volume control: Precise metering for process repeatability. Mass flow or volumetric measurement. Safety: Double containment, leak detection, emergency shutoff, chemical-compatible materials, exhausted enclosures. Monitoring: Track chemical levels, usage rates, blend accuracy, delivery pressure. Automated reordering. Day tanks: Smaller tanks near tools for immediate supply, fed from central storage. Waste handling: Return lines for unused chemicals, connection to waste treatment.