Deposition Simulation uses computational models to predict thin film growth, enabling process optimization before expensive experimental runs.

What Is Deposition Simulation?

• Physics: Models surface kinetics, gas transport, plasma chemistry
• Outputs: Film thickness, uniformity, composition profiles
• Software: COMSOL, Silvaco ATHENA, Synopsis TCAD
• Scale: Reactor-level to atomic-level models

Why Deposition Simulation Matters

A single CVD tool costs $5-20M. Simulation reduces trial-and-error experimentation, accelerating process development and improving uniformity.

<svg viewBox="0 0 368 226" xmlns="http://www.w3.org/2000/svg" style="max-width:100%;height:auto" role="img"><rect x="0" y="0" width="368" height="226" rx="12" fill="#0d1117"/><g font-family="ui-monospace,SFMono-Regular,Menlo,Consolas,&quot;Liberation Mono&quot;,monospace" font-size="14"><text xml:space="preserve" x="20" y="31.7"><tspan fill="#c9d1d9">Deposition Simulation Hierarchy:</tspan></text><text xml:space="preserve" x="20" y="50.7"><tspan fill="#c9d1d9">Equipment Level:        Feature Level:</tspan></text><text xml:space="preserve" x="20" y="69.7"><tspan fill="#6e7681">┌─────────────┐</tspan><tspan fill="#c9d1d9">        </tspan><tspan fill="#6e7681">┌───────────┐</tspan></text><text xml:space="preserve" x="20" y="88.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9"> Gas flow    </tspan><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">        </tspan><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9"> Surface   </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="107.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9"> Temperature </tspan><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">   </tspan><tspan fill="#6e7681">→</tspan><tspan fill="#c9d1d9">    </tspan><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9"> reactions </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="126.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9"> Pressure    </tspan><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">        </tspan><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9"> Step      </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="145.7"><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9"> Power       </tspan><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9">        </tspan><tspan fill="#6e7681">│</tspan><tspan fill="#c9d1d9"> coverage  </tspan><tspan fill="#6e7681">│</tspan></text><text xml:space="preserve" x="20" y="164.7"><tspan fill="#6e7681">└─────────────┘</tspan><tspan fill="#c9d1d9">        </tspan><tspan fill="#6e7681">└───────────┘</tspan></text><text xml:space="preserve" x="20" y="183.7"><tspan fill="#c9d1d9">   Continuum              Kinetic</tspan></text><text xml:space="preserve" x="20" y="202.7"><tspan fill="#c9d1d9">   (CFD, thermal)         (Monte Carlo)</tspan></text></g></svg>

Simulation Types: