Depth of Focus (DOF) is the range of vertical positions (wafer height) over which the projected aerial image remains acceptably sharp and the printed feature dimensions stay within specification, representing a critical process window parameter in semiconductor lithography. DOF determines how much the wafer surface can deviate from the ideal focal plane — due to wafer flatness variation, chuck leveling, topography from underlying layers, and focus control accuracy — while still producing acceptable patterns. The Rayleigh DOF formula is: DOF = k₂ × λ / NA², where λ is the exposure wavelength, NA is the numerical aperture, and k₂ is a process-dependent factor (typically 0.5-1.0). This relationship reveals a fundamental tradeoff: increasing NA improves resolution (proportional to λ/NA) but dramatically reduces DOF (proportional to λ/NA²) — resolution improves linearly with NA while DOF degrades quadratically. For 193nm immersion at NA = 1.35: DOF ≈ 0.5 × 193nm / 1.35² ≈ 53nm — an extraordinarily thin slice requiring sub-50nm focus control accuracy. Factors consuming the DOF budget include: wafer non-flatness (local height variation within the exposure field — specified as focal plane deviation, typically 20-40nm for advanced wafers), topography (height variations from underlying metal, dielectric, and gate layers — can consume 50-100nm or more), lens aberrations (field-dependent focal plane curvature and astigmatism — calibrated and corrected but with residual errors), and environmental factors (pressure and temperature changes affecting the air or immersion medium refractive index). DOF enhancement techniques include: phase-shift masks (improving image contrast allows slightly defocused patterns to still print acceptably), source optimization (specific illumination conditions can improve DOF for targeted feature types), chemical mechanical planarization (CMP — flattening wafer topography to reduce the focus budget consumed by surface height variation), sub-resolution assist features (SRAF — improving process window robustness), and computational lithography (co-optimizing source, mask, and resist processing for maximum DOF).