Exhaust scrubbers neutralize toxic and hazardous gases from process tools before releasing air to the environment. Purpose: Remove toxic, corrosive, or otherwise harmful gases from exhaust streams to meet environmental and safety regulations. Types: Wet scrubbers: Pass exhaust through liquid spray or packed tower. Water or chemical solutions absorb/neutralize gases. Dry scrubbers: Use solid media (activated carbon, chemical adsorbents) to capture or react with gases. Burn/oxidation: Thermal oxidizers or burn boxes for combustible gases like silane. Target gases: Acids (HF, HCl), bases (NH3), toxics (AsH3, PH3), pyrophorics (SiH4), VOCs, fluorinated compounds. Scrubber selection: Match scrubber type to exhaust chemistry. May need multiple stages or different scrubbers for different streams. Efficiency requirements: Removal efficiencies of 99%+ for regulated emissions. Continuous monitoring required. Waste streams: Wet scrubbers produce liquid waste requiring treatment. Dry media requires disposal/regeneration. Maintenance: Media replacement, spray nozzle cleaning, pump service, monitoring system calibration. Regulations: Permits specify allowable emissions. Scrubbers sized to meet permit requirements.