Fractured Data is the mask writer input format where complex layout polygons have been decomposed into simple geometric primitives — rectangles, trapezoids, or triangles that the mask writer can directly expose, converting arbitrary polygon shapes into sequences of individual "shots" or exposures.

Fracturing Process

• Input: OPC-corrected polygons — complex, non-convex shapes with many vertices.
• Decomposition: Split each polygon into non-overlapping rectangles or trapezoids.
• Shot Count: Each primitive becomes one "shot" on the mask writer — total shot count determines write time.
• Optimization: Advanced fracturing algorithms minimize shot count while maintaining edge placement accuracy.

Why It Matters

• Write Time: Shot count directly determines mask write time — 10⁹ shots at advanced nodes can take 10-20+ hours.
• Data Volume: Fractured data is much larger than design data — 10-100× expansion factor.
• Edge Quality: How polygons are fractured affects the mask edge quality — poor fracturing creates artifacts.

Fractured Data is chopping designs into bite-sized shots — decomposing complex polygons into simple shapes that the mask writer can expose one at a time.