Home Knowledge Base Gauge R&R (Repeatability and Reproducibility)

Gauge R&R (Repeatability and Reproducibility) is the primary statistical study for quantifying measurement system variation — separating the variation caused by the measurement instrument (repeatability) from variation caused by different operators or conditions (reproducibility) to determine if a gauge is capable of making reliable measurements for process control and product acceptance.

What Is Gauge R&R?

Why Gauge R&R Matters

Gauge R&R Components

Gauge R&R Study Design

ParameterTypical Setup
Operators2-3 (or automated = 1)
Parts10 (spanning the process range)
Trials2-3 per operator per part
Total measurements60-90
Analysis methodANOVA (preferred) or Range method

Acceptance Criteria

MetricExcellentAcceptableUnacceptable
%GRR (vs. tolerance)<10%10-30%>30%
%GRR (vs. process)<10%10-30%>30%
ndc≥10≥5<5

Gauge R&R is the quantitative proof that semiconductor metrology tools can make reliable measurements — without passing Gauge R&R, no measurement system should be used for production decisions, SPC monitoring, or customer-facing quality data.

gage r&r (repeatability and reproducibility)gage r&rrepeatability and reproducibilityquality

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