GEM300 is the SEMI equipment communication standard designed specifically for 300mm automated wafer fabs. It extends the original SECS/GEM standards with capabilities required for fully automated factory operation with zero operator intervention at the tool.

GEM300 vs. SECS/GEM

SECS/GEM was designed for 200mm fabs with operator-loaded tools and requires manual lot selection. GEM300 was designed for 300mm FOUP-based fabs where everything happens automatically—from carrier delivery to process completion.

Key GEM300 Standards

• E87 (Carrier Management): Tracks FOUPs at load ports—carrier ID, slot map, content verification • E90 (Substrate Tracking): Tracks individual wafer location within the tool (which chamber, which slot) • E94 (Control Job Management): Host commands the tool to process specific wafers with specific recipes • E40 (Process Job Management): Defines and manages process jobs within the equipment • E116 (Equipment Performance Tracking): Reports tool states and utilization data to host

How It Works

The AMHS delivers a FOUP to the tool load port. E87 reads the carrier ID and reports to the host. The host sends an E94 control job specifying which wafers to process and which recipe to use. The tool processes the wafers while reporting E90 substrate moves. Finally, the host collects data and dispatches the FOUP to the next tool.