Load ports are the interface where wafer pods (FOUPs) dock to process tools for automated wafer transfer. Function: Receive pod from transport system, open pod door in controlled environment, allow robot access to wafers. Mechanism: Pod placed on kinematic mount, door sealed to tool interface, pod door and tool door open together into clean mini-environment. FOUP interface: Standardized mechanical and electrical interface per SEMI standards. Mini-environment seal: When docked, pod interior connects to tool EFEM (clean mini-environment). Ambient air excluded. Sensors: Detect pod presence, verify proper seating, wafer mapping (detect which slots have wafers). Automation: Received from OHT automatically, or manually loaded. Status communicated to factory MES. Multiple ports: Tools typically have 2-4 load ports for continuous processing while pods swap. N2 purge ports: Some load ports connect to pod N2 purge to maintain wafer protection. Door opening: Latch mechanics, door retraction with minimal particle generation. Maintenance: Regular cleaning, seal inspection, sensor calibration.