A Manufacturing Execution System is the central software platform that manages, monitors, and tracks all wafer fabrication operations in real time. It's the backbone of fab automation and production control.

Core Functions

Lot Tracking follows every lot from start to finish—current location, step, status, and complete history. Recipe Management ensures the correct process recipe runs on the correct tool for each lot. Dispatching generates prioritized work lists for each tool based on dispatching rules. Q-Time Enforcement alerts and escalates when lots approach critical queue-time limits. Data Collection logs all process parameters, timestamps, operator actions, and equipment events.

Key Integrations

The MES connects to equipment via SECS/GEM or GEM300 protocols for automated lot processing. Process data flows to SPC systems for real-time monitoring. Lot status feeds scheduling systems for capacity and delivery forecasting. Yield management links inline and end-of-line test data to lot processing history.

Major MES Vendors

• Applied Materials (PROMIS/Fab300): Widely used in 300mm fabs • Siemens (Camstar): Common in packaging and specialty fabs • IBM (SiView): Legacy system still used in some fabs