OBIRCH (Optical Beam Induced Resistance Change) is a laser-based failure analysis technique — that scans a focused laser beam across the IC surface while monitoring changes in resistance (current), pinpointing resistive defects like voids, cracks, or thin metal lines.
What Is OBIRCH?
- Principle: The laser locally heats the metal. If a resistive defect exists, heating changes its resistance, causing a measurable change in current ($Delta I$).
- Normal Metal: Small, predictable $Delta I$ (positive temperature coefficient).
- Defect: Anomalously large or inverse $Delta I$ indicates a void, crack, or contamination.
- Resolution: ~1 $mu m$ (determined by laser spot size).
Why It Matters
- Interconnect Defects: The go-to technique for finding electromigration voids, stress migration cracks, and via failures.
- Non-Destructive: Performed on powered, functioning devices.
- Complementary: Often used with EMMI (finds active defects) while OBIRCH finds passive resistive ones.
OBIRCH is the metal doctor for ICs — diagnosing hidden resistive diseases in the interconnect metallization by feeling for changes under laser stimulation.
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