A recipe is a defined set of process parameters that control one process step in semiconductor manufacturing. Parameters include: Time, temperature, pressure, gas flows, RF power, bias, chemical concentrations. Specificity: Recipes are tool-specific and often wafer-specific. Same process may have different recipes on different tools. Structure: May include multiple steps (preheat, main process, purge, cool) each with own parameters. Development: Engineers develop and optimize recipes for target results. DOE (Design of Experiments) used for optimization. Qualification: New recipes undergo qualification testing before production use. Version control: Recipes are versioned with change tracking. Recipe management: Central database stores qualified recipes. Tool downloads recipe for each lot. Security: Access controls prevent unauthorized recipe changes. Tuning parameters: Some parameters may be adjustable within limits for fine-tuning. Recipe vs process: Recipe is the how (settings), process is the what (physical/chemical result). Golden recipes: Fully qualified, locked recipes for production. Engineering recipes: For development and troubleshooting.