Process capability analysis is the statistical evaluation of whether a manufacturing process can consistently produce output within specification limits — using indices like Cp, Cpk, Pp, and Ppk to quantify process performance, predict defect rates, and drive continuous improvement in semiconductor manufacturing.
Key Indices
- Cp: Potential capability (spread only, ignoring centering).
- Cpk: Actual capability (spread AND centering).
- Pp: Overall performance (using total variation, not within-subgroup).
- Ppk: Overall performance adjusted for centering.
Cp vs Cpk vs Pp vs Ppk
- Cp/Cpk: Use within-subgroup variation (short-term capability).
- Pp/Ppk: Use overall variation (long-term performance).
- Cpk = Ppk: Process is stable with no between-subgroup variation.
- Cpk > Ppk: Significant between-subgroup shifts present.
Sigma Level Conversion
- Cpk = 1.0 → 3σ → 2,700 DPPM.
- Cpk = 1.33 → 4σ → 63 DPPM.
- Cpk = 1.67 → 5σ → 0.6 DPPM.
- Cpk = 2.0 → 6σ → 0.002 DPPM (3.4 DPMO with 1.5σ shift).
Process capability analysis is the quantitative foundation for process qualification — providing the mathematical proof that a manufacturing process is ready for production.
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