SRM (Standard Reference Material) is a certified reference material produced and certified by the National Institute of Standards and Technology (NIST) — representing the highest level of measurement traceability in the United States, SRMs provide certified property values with NIST-traceable uncertainties for calibration and quality assurance.

SRM Examples for Semiconductors

• SRM 2059: Photomask linewidth standard — certified line widths for CD calibration.
• SRM 2000: Silicon step height standard — certified step heights for profilometry calibration.
• SRM 2800: Microscope magnification standard — certified pitch for SEM/optical microscope calibration.
• SRM 1196: Standard depth profiling material — for SIMS and XPS depth calibration.

Why It Matters

• NIST Traceability: SRMs provide direct traceability to NIST — the highest domestic metrological authority.
• Industry Standard: SRMs are the accepted calibration references in semiconductor metrology.
• Limited Supply: SRMs are produced in limited quantities — some are regularly restocked, others are discontinued.

SRM is NIST-certified truth — the U.S. national standard reference material providing the highest level of measurement traceability for calibration.