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Glossary

171 technical terms and definitions

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High-Na EUV

high na euv, high-na euv lithography, numerical aperture 0.55, anamorphic optics, asml exe 5000, sub 8nm lithography, euv high na, 0.55 na euv, high na

High-NA EUV: 0.55 NA Anamorphic Optics, Sub-8nm Lithography, and Sub-Picometer Precision High-NA Extreme Ultraviolet (EUV) lithography is the next-generation semiconductor…