agv (automated guided vehicle)

AGVs (Automated Guided Vehicles) are mobile robots that transport wafers, materials, or supplies on the fab floor. **Applications**: FOUP transport (alternative or supplement to OHT), material delivery, sample transport, general logistics. **Navigation**: Laser guidance, magnetic tape following, natural feature navigation (SLAM). Modern AGVs use LiDAR and cameras. **Comparison to OHT**: AGVs use floor space, more flexible routing, easier to reconfigure, may be preferred for non-wafer materials. **Wafer transport**: In fabs without OHT infrastructure, AGVs carry FOUPs between tools. More common in 200mm fabs. **Material handling**: Deliver masks, chemicals, supplies, consumables to tools. Keep fab floor staff focused on processing. **Traffic management**: Central controller coordinates multiple AGVs, optimizes routes, prevents collisions. **Charging**: Battery powered with automated charging stations. Fleet management ensures availability. **Cleanroom compatibility**: Designed for cleanroom operation - minimal particle generation, special wheels and drives. **Safety**: Obstacle detection, emergency stops, warning lights. Operate around personnel safely.