anti-stiction coating
**Anti-Stiction Coatings** are surface treatments applied to MEMS devices to prevent moving parts from permanently adhering to adjacent surfaces due to molecular forces.
## What Are Anti-Stiction Coatings?
- **Purpose**: Prevent release stiction and in-use stiction in MEMS
- **Materials**: SAMs (self-assembled monolayers), fluoropolymers, DLC
- **Mechanism**: Reduce surface energy and van der Waals attraction
- **Application**: Vapor phase deposition or liquid immersion
## Why Anti-Stiction Coatings Matter
MEMS devices with moving parts (accelerometers, mirrors, RF switches) can permanently stick during release etch or operation, causing device failure.
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**Common Anti-Stiction Solutions**:
| Coating | Contact Angle | Durability |
|---------|---------------|------------|
| FDTS SAM | >110° | Moderate |
| FOTS SAM | >105° | Good |
| Parylene | ~90° | Excellent |
| DLC | ~70-85° | Excellent |