chase

Chases are vertical or horizontal enclosed spaces for routing utilities, pipes, and cables throughout the fab facility. **Vertical chases**: Shafts running between floors for risers - piping, electrical, exhaust ducts connecting levels. **Horizontal chases**: Corridors or enclosed spaces running through or around cleanroom for utility distribution. **Contents**: Process gas lines, chemical piping, electrical cables, exhaust ducts, vacuum lines, DI water, cooling water. **Access**: Access doors or removable panels for maintenance and expansion. May be pressurized or exhausted depending on contents. **Safety**: Hazardous chemical lines require ventilated chases with leak detection. Gas lines have seismic bracing. **Separation**: Different utility types often in separate chases - acid lines separate from electrical, bulk gas separate from exhaust. **Fire protection**: Fire dampers and detection in chases that pass through fire barriers. **Expansion capability**: Chases designed with spare capacity for future utilities and modifications. **Routing design**: Minimizes chase runs through cleanroom, uses perimeter routing where possible to reduce contamination risk.