fractured data

**Fractured Data** is the **mask writer input format where complex layout polygons have been decomposed into simple geometric primitives** — rectangles, trapezoids, or triangles that the mask writer can directly expose, converting arbitrary polygon shapes into sequences of individual "shots" or exposures. **Fracturing Process** - **Input**: OPC-corrected polygons — complex, non-convex shapes with many vertices. - **Decomposition**: Split each polygon into non-overlapping rectangles or trapezoids. - **Shot Count**: Each primitive becomes one "shot" on the mask writer — total shot count determines write time. - **Optimization**: Advanced fracturing algorithms minimize shot count while maintaining edge placement accuracy. **Why It Matters** - **Write Time**: Shot count directly determines mask write time — 10⁹ shots at advanced nodes can take 10-20+ hours. - **Data Volume**: Fractured data is much larger than design data — 10-100× expansion factor. - **Edge Quality**: How polygons are fractured affects the mask edge quality — poor fracturing creates artifacts. **Fractured Data** is **chopping designs into bite-sized shots** — decomposing complex polygons into simple shapes that the mask writer can expose one at a time.