hepa filter (high-efficiency particulate air)

HEPA filters (High-Efficiency Particulate Air) remove 99.97% of particles 0.3 microns and larger, standard for cleanroom air filtration. **Specification**: Must capture 99.97% of particles at MPPS (Most Penetrating Particle Size) of 0.3 microns. **How they work**: Fibrous mat captures particles via interception, impaction, diffusion, and electrostatic attraction. Not like a sieve. **0.3 micron significance**: Most difficult size to filter. Larger particles caught by impaction, smaller by diffusion. 0.3um is the sweet spot that escapes both mechanisms most easily. **Materials**: Glass fiber, synthetic fibers, or combinations. Pleated for surface area. **Applications in fabs**: Ceiling-mounted FFUs in cleanrooms, air handling systems, point-of-use filtration for process equipment. **Maintenance**: Pressure drop monitoring indicates loading. Replace when specified differential pressure reached. **HEPA grades**: H10-H14 in European classification, H14 being 99.995% efficiency. **Comparison to ULPA**: HEPA is 99.97% at 0.3um. ULPA is 99.999% at 0.12um. ULPA for most critical semiconductor applications. **Cost**: More expensive than standard filters, but essential for contamination control.