load port

Load ports are the interface where wafer pods (FOUPs) dock to process tools for automated wafer transfer. **Function**: Receive pod from transport system, open pod door in controlled environment, allow robot access to wafers. **Mechanism**: Pod placed on kinematic mount, door sealed to tool interface, pod door and tool door open together into clean mini-environment. **FOUP interface**: Standardized mechanical and electrical interface per SEMI standards. **Mini-environment seal**: When docked, pod interior connects to tool EFEM (clean mini-environment). Ambient air excluded. **Sensors**: Detect pod presence, verify proper seating, wafer mapping (detect which slots have wafers). **Automation**: Received from OHT automatically, or manually loaded. Status communicated to factory MES. **Multiple ports**: Tools typically have 2-4 load ports for continuous processing while pods swap. **N2 purge ports**: Some load ports connect to pod N2 purge to maintain wafer protection. **Door opening**: Latch mechanics, door retraction with minimal particle generation. **Maintenance**: Regular cleaning, seal inspection, sensor calibration.