micro-xrf

**Micro-XRF** (Micro X-Ray Fluorescence) is a **spatially resolved XRF technique that uses focused or collimated X-ray beams to achieve micrometer-scale spatial resolution** — enabling elemental analysis and mapping of features, defects, and contamination at specific locations. **How Does Micro-XRF Achieve High Resolution?** - **Polycapillary Optics**: Focus X-rays to ~10-30 μm spot using polycapillary lenses. - **Monocapillary**: Single-bounce ellipsoidal mirrors can achieve ~5-10 μm spots. - **Synchrotron**: Synchrotron micro-XRF achieves sub-micrometer resolution with zone plates or mirrors. - **Confocal**: 3D elemental mapping using confocal geometry (excitation + detection optics). **Why It Matters** - **Defect Analysis**: Identifies the elemental composition of individual defects and particles on wafers. - **Failure Analysis**: Maps elemental distribution at failure sites (e.g., Cu migration, metallic contamination). - **Non-Destructive**: Preserves the sample for subsequent analysis (SEM, TEM, SIMS). **Micro-XRF** is **a focused elemental microscope** — combining the elemental identification of XRF with micrometer spatial resolution.