rfid tracking

RFID (Radio-Frequency Identification) tags attached to **FOUPs (Front Opening Unified Pods)** enable automated wafer lot tracking throughout the 300mm semiconductor fab **without manual scanning** or line-of-sight requirements. **How It Works** An **RFID tag** (passive or active) is embedded in each FOUP carrier, storing the carrier ID and optionally lot data. **Readers** are installed at load ports, stockers, AMHS rail junctions, and tool interfaces. When a FOUP arrives at any reader location, the carrier ID is **automatically read** and reported to MES. Unlike barcodes, RFID reads through plastic FOUP material without requiring precise alignment. **Fab Applications** The **AMHS (Automated Material Handling System)** reads RFID to route FOUPs to the correct destination. At the **tool load port**, equipment reads the carrier ID via E87 (GEM300) and requests processing instructions from the host. **Stocker inventory** systems track all FOUPs with exact shelf locations. This provides **real-time WIP visibility**—the location of every lot in the fab for MES and scheduling systems. **RFID vs. Barcode** **RFID**: Automatic, no line-of-sight needed, faster, works perfectly in cleanroom environments. Higher cost per tag. **Barcode**: Requires manual scanning or precise alignment. Lower cost. Still commonly used for wafer-level identification.