scm
**Scanning Capacitance Microscopy (SCM)** is a nanoscale metrology technique that maps carrier concentration in semiconductors by measuring local capacitance variations with an AFM-based probe.
## What Is SCM?
- **Principle**: Metal-coated AFM tip forms MOS capacitor with sample
- **Resolution**: 10-20nm lateral, sub-nm depth sensitivity
- **Output**: dC/dV signal proportional to carrier concentration
- **Applications**: 2D dopant profiling, junction delineation, failure analysis
## Why SCM Matters
As transistors shrink, understanding nanoscale dopant distribution becomes critical. SCM provides non-destructive 2D carrier imaging impossible with bulk techniques.
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**SCM vs. Other Profiling**:
| Method | Resolution | Quantitative | Sample Prep |
|--------|------------|--------------|-------------|
| SCM | 10-20nm | Semi-quant | Cross-section |
| SSRM | 1-5nm | Yes | Cross-section |
| SIMS | 1nm depth | Yes | Destructive |