S2f13

S2F13/S2F14 is the SECS-II message pair the host uses to read the current value of one or more Equipment Constants (ECIDs) from a tool — recipe-independent configuration values like a chamber's calibration offset, a default timeout, or a mechanical limit, as opposed to Status Variables (SVIDs), which report the tool's live, continuously-changing operating state. S2F13 (Equipment Constant Request) carries a list of ECIDs the host wants to read; S2F14 (Equipment Constant Data) returns the corresponding values in the same order, which is why host software has to match the request list's ordering against the reply rather than assuming any particular ECID always lands in a fixed position in the response.

Host needs current equipment-constant values
Calibration offsets, timeouts, mechanical limits — not live state
S2F13/S2F14 equipment-constant readOrder of returned values matches order requested
S2F13 sent: list of ECIDs
Equipment Constant Request
S2F14 returned: matching values
Equipment Constant Data, same order as requested
Host has current configuration values
Can compare against expected baseline, or just record them

The distinction between an equipment constant and a status variable is the single most important thing to get right when working with S2F13/S2F14, because conflating the two leads to querying the wrong mechanism entirely — ECIDs describe relatively stable configuration that changes rarely and usually only through deliberate action (a recalibration, a maintenance adjustment), while SVIDs describe values that can change from moment to moment during normal operation, and a host polling S2F13/S2F14 at high frequency expecting to see live process data will instead just see the same unchanged configuration values returned every time. This is also why equipment constants are the natural target for configuration audits and golden-recipe verification, while status variables are the natural target for real-time process monitoring — each message pair exists because the underlying data has genuinely different update characteristics, not as arbitrary API design.

S2F13/S2F14 — Equipment Constants vs. Status Variables ECIDs change rarely; SVIDs change constantly during normal operation ECID (S2F13/S2F14) Calibration offset Default timeout changes only via deliberate action SVID (S1F3/S1F4, etc.) Chamber pressure right now Current process step changes continuously during operation Polling S2F13/S2F14 at high frequency for live data returns the same unchanged values every time — wrong mechanism for live monitoring use SVIDs and collection events for anything that changes in real time

S2F13/S2F14 pairs naturally with S2F15/S2F16 (Equipment Constant Update, which writes new ECID values rather than only reading them), and both depend on the equipment's Common Equipment Model (SEMI E120) having already documented exactly which ECIDs exist and what each one means, so a host integration can request the right identifiers in the first place rather than guessing.

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