Semi E105

SEMI E105 defines the CIM Framework Scheduling Component, the concrete functional specification for the domain SEMI E81's architecture labels "scheduling" — what a software component must do to decide which lot runs on which tool next, in what order, and under what priority, the dispatching logic that sits between a fab's MES and the equipment-communication layer that actually carries instructions out to tools. Just as SEMI E102 makes the material-transport domain concretely implementable, E105 is what turns scheduling from an architectural placeholder in E81's domain map into an actual specification — what operations a scheduling component must expose (dispatch requests, priority queries, schedule queries) and what data it must track (lot priority, equipment availability, queue state) to make real dispatching decisions.

SEMI E81 designates a scheduling domain
Conceptual boundary only, separate from material transport and equipment comms
SEMI E105 scheduling component specBuilt using E96/E97's general architecture and vocabulary
Dispatch + priority operations
What the component lets MES ask for
Queue state + equipment availability tracking
What the component must know to decide well
Scheduling domain is actually implementable
A vendor can build a conformant dispatcher from this spec

Scheduling is deliberately kept as its own domain separate from material transport and equipment communication, even though all three domains clearly have to cooperate for a wafer to actually move and get processed, because the decision of what should happen next is a fundamentally different kind of responsibility than the mechanics of making it happen — a scheduling component decides that lot X should go to tool Y next, a material-transport component then physically moves lot X's carrier there, and an equipment-communication component (the SECS/GEM layer) issues the actual process-start command, each one able to be developed, tuned, or replaced independently precisely because E105 keeps the decision-making logic separate from the execution mechanics. This separation is what lets a fab swap in a more sophisticated scheduling algorithm without touching its material-handling or equipment-communication software at all, as long as the new scheduler still conforms to E105's interface.

SEMI E105 — Deciding vs. Doing, Kept Separate scheduling decides; other domains execute E105 Scheduling "Lot X runs on Tool Y next" decision only E102 Material Transport Physically moves carrier SECS/GEM layer Issues process-start command Swap the scheduling algorithm independently material-transport and equipment-comms code never has to change as long as the new scheduler conforms to the E105 interface

SEMI E105 is the decision-making counterpart to SEMI E102's execution-layer material-transport specification, both concrete domain components built on the same SEMI E81/E96/E97 foundation, and a scheduling component's dispatch decisions ultimately flow down into Control-Job Management (SEMI E94) and Process Job state transitions (SEMI E40) once a decision has been made and handed off to the equipment-communication layer for actual execution.

Take SEMI E105 further

Ask the copilot about this term, or have our engineers assess it against your process.

Ask CFSGPT about this → Request a technical assessment → Open the CFS app