Semi E112

SEMI E112 specifies the MRSP150 — a multiple-reticle 150 mm SMIF pod built to hold several 6-inch reticles in a single sealed carrier — defining its external envelope, internal slot spacing, and door-seal interface so a fab's reticle stocker can batch-load or batch-store multiple reticles in one handling operation instead of one pod per reticle. E111's RSP150 fixes the single-reticle 150 mm pod geometry, but a mask shop or fab moving several reticles together — for a multi-layer mask set shipped as a group, or for bulk stocker restocking — needs a pod sized and slotted for multiple reticles at once, and a handler built only for the RSP150's single-slot geometry cannot safely engage an MRSP150 without knowing its different internal layout.

Mask shop ships a multi-layer reticle set, or a fab bulk-restocks
Several 150 mm reticles need to move together
SEMI E112 — MRSP150 multi-reticle podDifferent fixed geometry than E111's single-reticle RSP150
Fixed external envelope sized for multiple reticle slots
Distinct internal slot spacing/indexing from the RSP150
Defined door-seal interface spanning all slots
One seal, one handling event, several reticles protected
Stocker batch-loads/stores several reticles in one operation
No repeated single-pod handling cycles for a grouped set

The reason E112 had to be its own standard rather than a documented "load more into an RSP150" variant is that a multi-slot pod changes the mechanical problem a handler has to solve — slot spacing, indexing, and the door-seal span across several reticles are different geometry questions than sealing one reticle, so a stocker that's only mechanically qualified against E111's single-reticle envelope has no basis for safely engaging an MRSP150's different internal layout. By giving the multi-reticle case its own fixed spec, E112 lets a fab or mask shop that regularly moves reticles in grouped sets (a multi-layer mask set for one device, or a batch restocking run) design handling automation against one committed geometry instead of treating "how many reticles might be in this pod" as a runtime unknown the handler has to accommodate.

SEMI E112 — The Multi-Slot Sibling of E111 different slot geometry means a different mechanical qualification E111 — RSP150 One reticle, one slot Single door-seal footprint Handler qualified to this geometry only E112 — MRSP150 Multiple reticles, multiple slots Door-seal spans all slots at once Needs its own handler qualification An RSP150-qualified handler cannot assume MRSP150 compatibility slot count changes the mechanical problem, not just the reticle count

E112 is what lets grouped reticle movement — a multi-layer mask set shipped together, or a bulk stocker restock — happen as one sealed, one-handling-event operation instead of forcing every reticle through a separate single-pod cycle, while keeping that multi-slot geometry as its own fixed, qualifiable standard rather than an ambiguous extension of E111's single-reticle spec.

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