Semi E122

SEMI E122 defines the Tester Specific Equipment Model (TSEM) — the set of status variables, equipment constants, alarms, and collection events specific to automated test equipment (ATE), built as a specialization of E120's generic Common Equipment Model for the test-floor's distinct terminology and data needs. E120's CEM covers equipment data in general terms that apply across process tool categories, but a wafer-sort or final-test system has its own vocabulary — test program identity, bin/sort results, site-to-site parallel-test status, tester-head configuration — that a generic CEM schema was never built to express; TSEM is what gives test-floor equipment a vendor-neutral model built around what a tester actually reports, the same role E123's HSEM later fills for handlers.

ATE tester needs to publish its equipment model to a host
Test program ID, bin results, site status aren't generic CEM concepts
SEMI E122 — TSEM, a tester-specific CEM specializationBuilt on E120's CEM structure, vocabulary for test equipment
Defined status variables for test program, bin, and site state
Vendor-neutral terms for tester-specific concepts
Collection events for test-run start/stop and result reporting
Same event model CEM already standardizes, test-specific content
Host auto-configures against any compliant tester's model
No per-vendor translation of test-floor-specific terminology

The reason test equipment needed its own CEM specialization rather than being described with E120's generic schema alone is that a tester's operationally meaningful data — which test program ran, what bin a die sorted into, which parallel-test site reported a result — has no natural equivalent in a schema built around generic status variables and alarms for process tools, so a host trying to auto-configure against a tester using only generic CEM concepts would have nowhere to put that tester-specific information. TSEM solves that by extending CEM's structure with a defined vocabulary for exactly those concepts, so a fab's test-floor host software can load any TSEM-compliant tester's equipment model the same way CEM already lets it load a process tool's model, instead of hand-coding test-specific integration per vendor.

SEMI E122 — CEM's Test-Floor Specialization generic CEM has no concept of a bin result or a parallel-test site SEMI E120 — Common Equipment Model Generic status variables, constants, alarms, events Applies broadly, no test-specific vocabulary E122 — TSEM (testers) Test program, bin, site status ATE-specific vocabulary on CEM E123 — HSEM (handlers, sibling) Handler-specific vocabulary Same specialization pattern as TSEM

E122's TSEM is what lets the test floor participate in the same auto-configuration workflow CEM already gives process tools: a host writes one TSEM-aware integration and it works against any vendor's wafer-sort or final-test system, because the tester-specific concepts that generic CEM never anticipated now have a defined, vendor-neutral home.

Take SEMI E122 further

Ask the copilot about this term, or have our engineers assess it against your process.

Ask CFSGPT about this → Request a technical assessment → Open the CFS app