Semi E127.1

SEMI E127.1 defines the exact SECS-II message set for IMMC — the specific status-variable IDs (SVIDs), remote-command definitions for triggering a measurement, and collection-event IDs (CEIDs) for delivering the result and its wafer/process-step correlation — rather than the general request/result/correlation behavior E127 establishes. E127 says a host should be able to trigger an integrated measurement module, receive the result, and tie it to the correct wafer and process step; E127.1 is the protocol-binding companion that fixes precisely which SECS-II messages, remote commands, and variable numbers carry that exchange, the same relationship E122.1 has to E122 and E123.1 has to E123 — now applied to embedded metrology instead of test-cell equipment.

SEMI E127 says: trigger, receive, and correlate a measurement
Defined behavior, but no fixed wire-level message set
SEMI E127.1 — SECS-II protocol binding for IMMCFixes the actual SVID/command/CEID numbers
Defined remote command to trigger an in-situ measurement
Same command structure across every compliant module
Defined SVIDs/CEIDs for result delivery and correlation data
No vendor-specific interpretation of how the result comes back
Host's GEM driver triggers and reads any module's result identically
No per-vendor translation layer for embedded-measurement data

The reason E127 needed its own protocol-binding companion is the same gap every CEM-adjacent specialization closes the same way: a defined request/result/correlation behavior in prose still leaves the actual remote-command structure and SVID/CEID numbering open to each process-tool vendor's own implementation, so two E127-compliant tools can trigger and report an embedded measurement using different commands and variable IDs the host has to reconcile by hand. E127.1 removes that gap by fixing the SECS-II message set itself, so a fab's host software can write one GEM driver against E127.1's defined numbering scheme and have it work against any process tool's integrated measurement module, rather than maintaining a per-vendor mapping table for triggering and reading in-situ metrology.

SEMI E127.1 — Fixing IMMC's Wire-Level Numbers embedded metrology gets the same binding guarantee as test-cell equipment SEMI E127 (IMMC) "Trigger, receive, and correlate a measurement" Behavior, numbering left open SEMI E127.1 Fixed remote command, SVID/CEID numbers Wire-level protocol binding Two E127-compliant tools can still trigger a measurement differently E127.1 is what makes the trigger-and-report sequence interchangeable

E127.1 completes IMMC the same way every ".1" protocol binding completes its base standard: E127 defines what an embedded measurement module and its host have to exchange, and E127.1 is the fixed SECS-II numbering scheme that makes that exchange identical across process-tool vendors, so a fab's host software never has to special-case a tool by brand to get usable in-situ measurement data out of it.

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