Semi E134

SEMI E134 defines Data Collection Management (DCM), the standard that lets an EDA (Equipment Data Acquisition) host actually request and receive the high-rate process data that Equipment Self Description (SEMI E125) told it was available — E125 publishes the catalog of what can be collected, and E134 is the messaging protocol that turns "I'd like parameters 3, 7, and 12, sampled every 100 milliseconds, starting now" into an actual standardized data stream. Without DCM, EqSD's catalog would just be a static list with no standardized way to act on it; E134 closes that gap by defining data-collection-plan creation, activation, modification, and the freeze-protected plan-versioning discipline that keeps a running collection plan from changing out from under an analysis pipeline mid-stream.

Host reads EqSD catalog (SEMI E125)
Knows which parameters exist, their units and max rate
SEMI E134 data-collection planCreate, activate, modify, freeze
Host defines a collection plan
Specific parameters, specific sample rate
Equipment streams data against the plan
Continuous, standardized, high-rate reporting
↻ plan stays active until changed
FDC / virtual metrology consumes the stream
Same plan definition, any compliant equipment

The freeze-protected plan-versioning requirement is what separates E134 from an ordinary polling API, since a fault-detection pipeline that's mid-analysis cannot tolerate the equipment silently changing what it's sampling or at what rate — E134 requires that an active collection plan's definition be frozen and versioned, so any change the host or equipment makes creates a new, separately-identified plan version rather than silently mutating the one a downstream analysis is currently consuming. This discipline exists because the entire value of high-rate EDA data collection is comparability across runs — a fault model trained on data from one plan version produces meaningless results if fed data from a silently different plan version, so freezing plan definitions is not bureaucratic overhead, it is the mechanism that keeps collected data scientifically usable at all.

SEMI E134 — Frozen, Versioned Collection Plans a plan in use cannot silently change underneath a running analysis Plan v1 (frozen, active) Params 3, 7, 12 @ 100ms consumed by FDC pipeline A change requested Plan v2 (new, separate) Params 3, 7, 12, 18 @ 50ms v1 keeps running, untouched Why versioning matters a model trained on Plan v1 data breaks if silently fed Plan v2 data freezing + versioning keeps every data stream traceable to one exact plan definition

SEMI E134 is the operational half of the EDA/Interface A trio this family forms — Equipment Self Description (SEMI E125) says what's available, E134 says how to actually collect it and keep that collection scientifically stable over time, and EDA Common Metadata (SEMI E164) standardizes the metadata that travels alongside the collected values so downstream analysis tools can interpret them consistently across equipment vendors.

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