Semi E139.1
SEMI E139.1 defines the XML schema for RaP's process-definition elements — the actual document structure a recipe uses to express its parameter sets, step sequencing, and conditional logic as a machine-parseable XML document, built on E138's shared common-component library, rather than the general download/verify/select lifecycle E139 establishes. E139 says a host should be able to download, verify, select, and version-control a recipe; E139.1 is the schema-definition companion that fixes precisely how a recipe's actual content — its gas flows, power steps, timing sequences, and any conditional branching the recipe includes — gets expressed as a structured XML document, rather than leaving the recipe's internal representation as an unspecified, often vendor-proprietary binary or text format.
The reason E139 needed its own schema-definition companion is the same gap nearly every lifecycle-management standard in this family closes the same way: being able to download and verify a recipe doesn't help if the recipe's actual content — the parameters and steps it's made of — has no standardized internal structure, because then "verify" can only mean checking a checksum, not meaningfully validating that a parameter is within range or that a step sequence is well-formed. E139.1 removes that gap by defining the XML elements a process-definition document is built from, reusing E138's common components for the basic pieces (timestamps, units, equipment IDs) rather than redefining them, so a host or third-party recipe-authoring tool can generate, validate, and parse recipe content against one shared schema instead of a per-vendor proprietary format.
E139.1 completes RaP the same way every XML-schema companion completes its base lifecycle standard: E139 defines what a host can do to a recipe's lifecycle, and E139.1 is the fixed XML structure that makes the recipe's actual content — parameters, step sequencing, conditional logic — something a host or third-party tool can generate, validate, and parse consistently, instead of a vendor-proprietary format no two tools agree on.