Semi E142.1

SEMI E142.1 defines the XML schema for substrate mapping — the actual document structure a slot-occupancy result uses to represent which slots are occupied, which are empty, and which wafer identity correlates to which slot, built on E138's shared common-component library, rather than the general mapping-verification behavior E142 establishes. E142 says equipment must determine and report actual slot occupancy before any transport or process step proceeds; E142.1 is the schema-definition companion that fixes precisely how that occupancy result and wafer-identity correlation gets expressed as a structured XML document, the same relationship E139.1's XML schema has to E139's RaP lifecycle, so a host parsing a mapping report doesn't have to interpret a vendor-specific representation of "slot 7 is occupied by wafer X."

The reason E142 needed its own schema-definition companion is the same gap every XML-schema standard in this family closes: a verification requirement in prose doesn't help a host software integration if the actual mapping result — which slots are occupied, which wafer is where — has no standardized document structure to parse, forcing every vendor's mapping-sensor report into its own ad hoc representation. E142.1 removes that gap by defining the XML elements a substrate-mapping result is built from, reusing E138's common components for the basic pieces rather than redefining them, so a host can validate and parse a mapping report against one shared schema regardless of which equipment vendor's mapping sensor generated it.

E142.1 completes substrate mapping the same way every XML-schema companion completes its base verification standard: E142 defines what has to be checked before handling proceeds, and E142.1 is the fixed XML structure that makes the resulting slot-occupancy and wafer-identity report something a host can parse consistently, instead of a vendor-specific format reinvented by every mapping-sensor manufacturer.