Semi E94.1

SEMI E94.1 defines the SECS-II message set that carries SEMI E94's control-job data between equipment and host — E94 defines the control-job data model (the structure that groups one or more process jobs with the carriers and recipes they apply to), while E94.1 defines the actual wire-level messages a tool and host exchange to create, start, and monitor those control jobs automatically. Without E94.1, E94's control-job model would describe how a host should organize process work across carriers and recipes in the abstract, but a host would have no standardized way to actually submit a control job to a tool or receive status as that job progresses — E94.1 is the protocol binding that turns the control-job model into real commands and events, the same role E90.1 plays for substrate tracking and E87.1 plays for carrier management.

SEMI E94 — control-job data model
Groups process jobs with their carriers and recipes
SEMI E94.1 — SECS-II message bindingHow control jobs actually get submitted and tracked
Host submits/starts a control job via SECS-II
Standardized request/response messages, not a proprietary API
Tool reports control-job state changes
Standardized SECS-II event reports as the job progresses
Host dispatches and monitors control jobs on any compliant tool
Same scheduling logic works across the whole mixed-vendor fleet

The reason control-job management needed its own SECS-II protocol spec rather than a generic command message is that a control job is a composite object — multiple process jobs, carrier assignments, and recipe bindings bundled together — and the host's dispatch logic needs to submit, query, and receive status on that whole composite structure consistently, not just on individual simpler commands. A fab's MES scheduling layer dispatching work across a mixed-vendor tool fleet needs every tool to accept and report control-job status using the same message structure, or the scheduler ends up with custom per-vendor dispatch logic — exactly the integration cost E94.1 eliminates by standardizing the SECS-II layer underneath E94's control-job model.

SEMI E94.1 — Control-Job Protocol Binding data model vs. the wire-level messages that carry it SEMI E94 — control job: process jobs + carriers + recipes The composite structure a host needs to dispatch SEMI E94.1 — SECS-II submit/status messages for that structure Standardized request/response and event reports Same dispatch/status logic, every vendor — no custom scheduler code

E94.1 is what lets an MES scheduling layer treat every tool in a mixed-vendor fleet the same way when dispatching composite work, closing the same data-model-to-wire-protocol gap that E90.1 and E87.1 close for substrate and carrier tracking.

Take SEMI E94.1 further

Ask the copilot about this term, or have our engineers assess it against your process.

Ask CFSGPT about this → Request a technical assessment → Open the CFS app