Semi E94

SEMI E94 defines Control-Job Management, the standard that lets a host bundle one or more process jobs — each one a request to run a specific recipe on a specific set of wafers — into a single control job that the equipment executes as one coordinated unit, which is what makes it possible to tell a multi-chamber tool "process these three lots, in this order, using these recipes" as one instruction instead of managing every chamber's workload by hand. A process job on its own only describes what happens to one group of wafers; a control job is the layer above that which sequences multiple process jobs together, decides which physical chamber or chambers each one runs on, and reports overall progress back to the host as the whole bundle moves through the tool.

Host defines the control job

Which process jobs, in what order, on which material

SEMI E94 control-job executionOne coordinated unit across multiple chambers

Process Job 1 dispatched to Chamber A

Recipe X on Lot 1

Process Job 2 dispatched to Chamber B

Recipe Y on Lot 2, in parallel

Control job reports unified progress

Host sees one status, not two independent chamber states

Control-job management is what separates a host's scheduling intent from the equipment's internal chamber-allocation logic, since the host specifies what needs to happen — these lots, these recipes, this order — while the equipment itself decides the mechanics of which physical chamber each process job actually runs on and when, based on real-time chamber availability the host typically doesn't need to micromanage. This division of responsibility is what lets a single control job span chambers running in parallel without the host having to track each chamber's state directly — the host monitors the control job's aggregate status, and E94 is the standard that defines exactly what states and transitions that aggregate status can report, so host software written against E94 works the same way regardless of how many chambers a given tool happens to have.

SEMI E94 sits directly on top of the substrate-level visibility Substrate Tracking (SEMI E90) provides — a control job's progress is ultimately computed from the state of the individual wafers inside its process jobs, and control-job scheduling is itself a central concern of a fab's MES recipe-and-dispatch logic even though E94 only standardizes how the host and equipment talk about it, not how the MES decides what to schedule next.

Semi E94

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