site acceptance test

**Site acceptance test** is the **post-installation verification that confirms equipment performs correctly in the customer facility environment after delivery and hookup** - it proves shipping, installation, and utility integration did not compromise tool readiness. **What Is Site acceptance test?** - **Definition**: SAT phase executed at the fab after mechanical install, utility connection, and safety clearance. - **Validation Focus**: Facility interfaces, subsystem operation, alarms, and key readiness checks under site conditions. - **Environment Difference**: Verifies behavior with customer power, gases, water, exhaust, and network controls. - **Release Context**: Successful SAT typically enables transition to process qualification stages. **Why Site acceptance test Matters** - **Integration Assurance**: Confirms tool and facility interfaces are correct before process-critical work begins. - **Shipping Damage Detection**: Identifies transport-induced misalignment or latent component failures. - **Safety and Compliance**: Validates interlocks and utility behavior under actual site constraints. - **Startup Risk Reduction**: Prevents hidden installation issues from appearing during production qualification. - **Accountability Clarity**: Documents whether open issues belong to vendor delivery or site integration. **How It Is Used in Practice** - **SAT Checklist**: Use standardized tests aligned to FAT baselines and site-specific requirements. - **Gap Closure**: Log and resolve SAT deviations before advancing to PQ or production release. - **Handover Evidence**: Maintain signed SAT package as part of qualification and audit records. Site acceptance test is **a required installation-integrity checkpoint in tool commissioning** - passing SAT confirms the equipment is correctly integrated and ready for process capability verification.