split-lot experiments

**Split-lot experiments** is the **controlled manufacturing trials that divide a lot into baseline and experimental subsets to isolate process effects** - they are the operational backbone of fab experimentation because they enable causal comparison under near-identical context. **What Is Split-lot experiments?** - **Definition**: Lot-level experiment where matched wafer groups receive different recipe settings or process conditions. - **Control Principle**: Keep all non-target variables constant so observed differences map to intentional change. - **Measured Outcomes**: Yield shift, parametric movement, defect signatures, and reliability impact. - **Experimental Types**: Single-factor splits, paired tool comparisons, and staged split verification runs. **Why Split-lot experiments Matters** - **Causal Clarity**: Split design provides stronger evidence than uncontrolled historical comparisons. - **Change Qualification**: New process settings can be validated with limited production risk. - **Yield Optimization**: Direct A/B data reveals whether proposed changes improve key metrics. - **Escalation Control**: Helps distinguish true process fixes from random run-to-run variation. - **Learning Traceability**: Results become reusable knowledge for future process tuning decisions. **How It Is Used in Practice** - **Split Planning**: Define objective metric, baseline condition, experimental condition, and success criteria. - **Execution Discipline**: Maintain strict run-order and metrology consistency across split branches. - **Statistical Review**: Use significance testing and effect-size analysis before adopting recipe change. Split-lot experiments are **the most practical controlled method for fab process decision-making** - disciplined split execution converts hypotheses into reliable production actions.

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