standard reference material

**SRM** (Standard Reference Material) is a **certified reference material produced and certified by the National Institute of Standards and Technology (NIST)** — representing the highest level of measurement traceability in the United States, SRMs provide certified property values with NIST-traceable uncertainties for calibration and quality assurance. **SRM Examples for Semiconductors** - **SRM 2059**: Photomask linewidth standard — certified line widths for CD calibration. - **SRM 2000**: Silicon step height standard — certified step heights for profilometry calibration. - **SRM 2800**: Microscope magnification standard — certified pitch for SEM/optical microscope calibration. - **SRM 1196**: Standard depth profiling material — for SIMS and XPS depth calibration. **Why It Matters** - **NIST Traceability**: SRMs provide direct traceability to NIST — the highest domestic metrological authority. - **Industry Standard**: SRMs are the accepted calibration references in semiconductor metrology. - **Limited Supply**: SRMs are produced in limited quantities — some are regularly restocked, others are discontinued. **SRM** is **NIST-certified truth** — the U.S. national standard reference material providing the highest level of measurement traceability for calibration.