agv routing
**AGV Routing** in semiconductor fabs involves optimizing paths for Automated Guided Vehicles that transport wafer lots between process tools.
## What Is AGV Routing?
- **System**: AMHS (Automated Material Handling System) component
- **Goal**: Minimize transport time while avoiding collisions
- **Methods**: Shortest path, traffic-aware, predictive routing
- **Scale**: 500+ AGVs in modern 300mm fabs
## Why AGV Routing Optimization Matters
Inefficient routing causes tool starvation, WIP pileups, and cycle time increases. Optimized routing can improve fab throughput 5-15%.
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**Routing Algorithm Factors**:
| Factor | Impact |
|--------|--------|
| Traffic density | Avoid congested corridors |
| Tool WIP levels | Prioritize starving tools |
| Battery status | Route near charging stations |
| Lot priority | Hot lots get faster paths |
| Maintenance | Avoid PM-blocked routes |