electron backscatter diffraction

**EBSD** (Electron Backscatter Diffraction) is a **SEM-based technique that determines crystal orientation by analyzing Kikuchi diffraction patterns formed by backscattered electrons** — providing grain structure, texture, phase maps, and misorientation data with ~50 nm spatial resolution. **How Does EBSD Work?** - **Setup**: Sample tilted ~70° toward a phosphor screen detector in the SEM. - **Kikuchi Pattern**: Backscattered electrons form a pattern of Kikuchi bands on the detector. - **Indexing**: Automated Hough transform identifies band positions -> determines crystal orientation. - **Mapping**: Scan the beam to produce orientation maps over large areas (mm²). **Why It Matters** - **Grain Structure**: Visualizes grain boundaries, grain size distribution, and crystallographic texture. - **Phase Identification**: Distinguishes different crystal phases (e.g., austenite vs. ferrite in steel). - **Statistical**: Large-area maps provide statistically significant texture and grain boundary data. **EBSD** is **the SEM's crystal orientation camera** — converting backscattered electron patterns into maps of grain structure, texture, and phase.