electron channeling contrast imaging

**ECCI** (Electron Channeling Contrast Imaging) is a **SEM technique that images individual dislocations and other crystal defects near the surface** — using the backscattered electron signal under controlled diffraction conditions to achieve TEM-like defect contrast in the SEM. **How Does ECCI Work?** - **Channeling**: At specific orientations, the electron beam channels along crystal planes, reducing backscattering. - **Defects**: Dislocations, stacking faults, and strain fields locally distort the channeling condition. - **Contrast**: Defects appear as bright or dark features on the channeling background. - **Setup**: Requires accurate orientation control (via EBSD mapping) to set up the channeling condition. **Why It Matters** - **Non-Destructive**: Images individual dislocations without TEM sample preparation — truly non-destructive. - **Large Area**: Can image dislocation distributions over mm² areas (impossible with TEM). - **SEM-Based**: Uses a standard SEM, making it accessible to most characterization labs. **ECCI** is **TEM-like defect imaging in the SEM** — revealing individual dislocations and stacking faults without cutting the sample.