Quantify Micralign Throughput over Contact Aligners
# Quantify Micralign's Throughput Advantage Over Contact Aligners
Contact aligners had to handle each wafer carefully to control contact force and avoid damaging either the mask or the wafer, which slowed the practical exposure rate per hour.
Micralign's non-contact approach removed that careful-contact handling step entirely, letting wafers move through the exposure station faster without the risk calculus contact printing demanded.
The combination of faster handling and a mask that did not degrade with use let Micralign-equipped lines sustain meaningfully higher wafer throughput than comparable contact-printing lines.
Diagram above: throughput, contact vs projection.
Diagram above: why throughput translated to cost.