rework
**Rework** is **reprocessing failed wafers or devices to recover yield** — stripping and redoing defective layers or steps, typically recovering 50-90% of failures, but adding cost and cycle time, making prevention preferable to rework.
**What Is Rework?**
- **Definition**: Reprocessing to fix defects and recover yield.
- **Methods**: Strip and redo layers, laser repair, reprogramming.
- **Recovery**: 50-90% of reworked units can be recovered.
- **Cost**: Adds processing cost and cycle time.
**Why Rework Matters**
- **Yield Recovery**: Salvage value from failed wafers/devices.
- **Cost**: Cheaper than scrapping but more expensive than first-pass success.
- **Cycle Time**: Adds days or weeks to manufacturing flow.
- **Capacity**: Consumes equipment capacity.
**Common Rework Types**
- **Photoresist Strip/Redo**: Fix lithography defects.
- **Metal Strip/Redeposit**: Fix metal layer defects.
- **Laser Repair**: Fix memory bit failures with redundancy.
- **Reprogramming**: Fix soft errors in non-volatile memory.
**Economics**: Rework is economical when recovery value exceeds rework cost, typically for expensive wafers or late-stage failures.
**Best Practice**: Minimize rework through defect prevention and first-pass quality (high FPY).
Rework is **yield recovery** — salvaging value from failures, but prevention through robust processes is always preferable to rework.