Semi E116.1

SEMI E116.1 defines the exact SECS-II message structure for Equipment Performance Tracking — the specific S6F11 collection-event report formats, report IDs (RPTIDs), and variable IDs (VIDs) a tool must use to transmit an E10 state-change event — rather than the general real-time-reporting concept E116 establishes. E116 says equipment should report E10 state transitions to the host automatically via collection events and status variables; E116.1 is the binding standard that pins down precisely which SECS-II message, which report definition, and which variable encoding a GEM-compliant tool has to emit so two different vendors' EPT implementations produce byte-for-byte parseable messages rather than two different interpretations of "report the state change."

The reason E116 needed its own protocol-binding companion is the same reason E99 needed E99.1 and E109 needed E109.1: a standard that says "report this event in real time" leaves the actual message layout open, and two vendors implementing E116 in good faith can still choose different RPTIDs, different VID assignments, or different report groupings for the same E10 transition, which forces the host to write and maintain a separate parser per vendor. E116.1 removes that ambiguity by fixing the SECS-II message structure itself, so a host's GEM interface can be written once against E116.1's defined RPTID/VID scheme and work against any tool that implements EPT, instead of treating each vendor's state-change reporting as its own integration project.

E116.1 is to E116 exactly what E99.1 is to E99 and E109.1 is to E109: the base standard establishes that equipment should report a category of event in real time, and the ".1" companion is what turns that intent into one fixed SECS-II message definition every vendor implements identically, which is the only way a host's GEM driver can treat EPT as plug-and-play across a mixed-vendor fab floor.