Semi E116

SEMI E116 defines Equipment Performance Tracking (EPT), the SECS/GEM messaging layer that lets equipment report its own E10 state transitions and timestamps to the host automatically, in real time, instead of a fab having to reconstruct availability and utilization after the fact from whatever logs each tool happens to keep. SEMI E10 defines what the states mean and how to calculate availability, utilization, and reliability from them; E116 is the companion standard that defines how a piece of equipment actually communicates those state changes to a host system as they happen, over the same SECS-II collection-event and status-variable mechanisms used elsewhere in GEM.

Equipment enters a new E10 state
e.g. transitions from Standby to Unscheduled Downtime
SEMI E116 real-time reportingCollection events + status variables, via SECS-II
State-change collection event fires
Equipment reports the transition and timestamp immediately
Host logs the transition centrally
No manual log reconciliation needed
E10 availability/utilization computed live
From continuously accumulated, host-side state-time data

Without E116, a fab can still apply E10's definitions, but only by collecting state-time data manually or through vendor-specific logging that has to be translated before it's comparable across tools — which defeats much of E10's own point, since E10 exists to make availability numbers comparable in the first place. E116 closes that gap by standardizing exactly which collection events and status variables an equipment must expose for state tracking, so a host's fleet-wide dashboard can pull live E10 metrics from tools built by different vendors the same way, rather than needing a custom integration per vendor just to get state-time data flowing.

SEMI E116 — Closing the Loop from State to Metric without E116, E10's definitions exist but the data doesn't flow automatically SEMI E10 defines state categories + formulas ? no standard way to get state data to the host Host dashboard wants live availability/utilization SEMI E116 (EPT) fills this gap Collection event per state change Host receives live, standardized data

SEMI E116 is to Equipment Reliability/Availability/Maintainability (SEMI E10) what Substrate Tracking (SEMI E90) is to Control-Job Management (SEMI E94) — one standard defines the meaning and math, the other defines the live data feed that makes the first standard usable in real time rather than only as a retrospective, manually-assembled report.

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