Semi E142.2

SEMI E142.2 defines the SECS-II message set for substrate mapping — the specific remote commands that trigger a mapping scan, the status-variable IDs (SVIDs) that report per-slot occupancy, and the collection-event IDs (CEIDs) that signal a completed or failed mapping operation — carrying E142.1's XML-defined slot-occupancy content over the classic SECS-II wire protocol, rather than the web-services path E142.4's item-transfer binding takes. E142 defines the mapping-verification requirement and E142.1 defines what a mapping result document contains, but neither fixes the actual stream/function numbers or remote-command names a host uses to request a mapping scan and receive its result over SECS-II — and since substrate mapping has to happen on essentially every carrier load across nearly all installed equipment, it needs a binding on the communication layer that equipment fleet already runs, the same role E139.2 plays for RaP.

E142 defines mapping verification; E142.1 defines the result's XML content
Neither fixes which SECS-II messages trigger a scan or carry the result
SEMI E142.2 — SECS-II protocol for substrate mappingFixes the remote commands, SVIDs, and CEIDs over the classic wire protocol
Defined remote command to trigger a mapping scan
Same command structure across every compliant tool
Defined SVIDs for per-slot status, CEIDs for scan completion/failure
Host knows definitively what the scan found before handling begins
Host triggers and reads a mapping scan the same way on any SECS-II-compliant tool
Works on the communication layer the installed equipment base already uses

The reason substrate mapping needed a SECS-II-specific binding, distinct from E142.1's content schema, is that a mapping scan is one of the highest-frequency equipment operations in a fab — it happens on nearly every carrier load, on nearly every tool, often multiple times per shift — so the actual trigger command and result-reporting mechanism have to be standardized on the wire protocol that overwhelming majority of installed equipment already speaks, rather than requiring a web-services upgrade just to get a basic, frequent safety check working consistently. E142.2 closes that gap by fixing the SECS-II remote command, SVIDs, and CEIDs for mapping scans, giving fabs a standardized way to trigger and interpret this frequent, safety-critical operation on the communication layer nearly every tool in the fleet already runs.

One Mapping Scan, Message by Message mapping happens on nearly every carrier load — it needs the wire protocol nearly every tool already speaks Host Equipment S2F41 RCMD=MAP_SCAN S2F42 HCACK=0, scanning... S6F11 CEID=MAP_COMPLETE S1F3 request SVID 9201-9230 S1F4 SVID 9202=empty, 9204=cross-slotted Same trigger command and SVID numbering on every compliant tool This runs dozens of times per shift — it has to work on the wire everything already speaks

E142.2 is what makes substrate mapping's frequent, safety-critical check consistent across the equipment layer that handles the overwhelming majority of carrier loads — by fixing the SECS-II remote command, SVIDs, and CEIDs for triggering and interpreting a mapping scan, it gives E142's verification requirement and E142.1's content schema an actual wire-level carrier on the communication protocol nearly every tool in a fab's fleet already speaks.

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