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AI Factory Glossary

23 technical terms and definitions

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vacuum packaging, packaging

Package under vacuum.

vacuum sealing, packaging

Remove air from package.

van der pauw hall, metrology

Hall measurement on arbitrary shape.

van der pauw structure,metrology

Measure sheet resistance of films.

vapor phase decomposition, vpd, metrology

Collect surface contaminants for analysis.

vent holes, packaging

Allow pressure equalization.

vent, packaging

Allow air escape.

very small outline package, vsop, packaging

Miniaturized outline package.

vi probe,metrology

Voltage-current probe for plasma impedance.

via chain,metrology

Series of vias to test reliability.

via cut,lithography

Selective via removal for routing flexibility.

via-first tsv, advanced packaging

Form TSV before bonding.

via-last tsv, advanced packaging

Form TSV after bonding.

via-middle tsv, advanced packaging

Form TSV during intermediate step.

via,lithography

Vertical connection between metal layers.

vibration isolation,metrology

Prevent mechanical disturbances.

virtual fabrication,simulation

Simulate entire process flow before manufacturing.

virtual metrology, manufacturing operations

Virtual metrology predicts measurements from process data reducing physical measurement needs.

virtual metrology, vm, metrology

Predict measurements from tool sensor data.

virtual metrology,metrology

Predict metrology results from tool sensor data without physical measurement.

void detection in bonded wafers, advanced packaging

Identify defects in bond.

voids in molding, packaging

Air pockets in compound.

voltage contrast imaging,metrology

Detect electrical state using SEM.