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AI Factory Glossary

9 technical terms and definitions

All Topics Semiconductor Generative AI
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x-ray absorption spectroscopy, xas, metrology

Study electronic structure and bonding.

x-ray fluorescence mapping, xrf, metrology

Map elemental composition.

x-ray photoelectron spectroscopy (xps),x-ray photoelectron spectroscopy,xps,metrology

Surface chemical analysis.

x-ray photoemission electron microscopy, xpeem, metrology

Spatially-resolved XPS.

x-ray reflectivity (xrr),x-ray reflectivity,xrr,metrology

Measure thickness density roughness.

x-ray scatterometry, metrology

Use X-rays for CD measurement.

xanes, xanes, metrology

Chemical state and local structure.

xrd (x-ray diffraction),xrd,x-ray diffraction,metrology

Analyze crystal structure and film stress using x-ray diffraction.

xrf (x-ray fluorescence),xrf,x-ray fluorescence,metrology

Measure elemental composition and film thickness via x-ray fluorescence.